Abstract:This article presents a tiny-size and high-performance thermal gas flow sensor with suspended Si/ Si thermopile formed in an ordinary non-silicon-on-insulator (SOI) (111) silicon wafer. A front-side bulk micromachining technique is herein employed to form the proposed gas flow sensor without double-side fabrication process, wafer bonding, and cavity-SOI needed. To achieve high sensitivity and quick response time, the suspended single-crystalline Si/ Si thermocouple which shows significantly higher Seebeck coefficient and lower noise compared to that of the traditional polysilicon/ polysilicon thermocouple is first used to construct the flow sensor. And the fishbone-shaped suspended SiN dielectric membrane is designed to maximize the thermal resistance between the Si heater and the silicon substrate, reducing heat dissipation from the Si heater to the silicon substrate. In addition, using high heat-conductivity Au-film to connect the cold junction and the bulk silicon acting as a heat-sink not only increases the temperature difference between the hot junction and the cold junction but also reduces the complexity of the fabrication process. Thanks to the single-side micromachining process, the sensor chip size is as small as mm. Finally, the characterization of the fabricated gas flow sensor was evaluated, showing an ultrahigh normalization sensitivity of 5 V/sccm/W, a quick response time of 1.44 ms, and a minimum detectable flow velocity (MDFV) of 0.0083 sccm.

SQI-CMOS based single crystal silicon micro-heaters for gas sensors

Design and simulation of resistive SOI CMOS micro-heaters for high temperature gas sensors

Novel design and characterisation of SOI CMOS micro-hotplates for high temperature gas sensors

Resistive gas sensor with integrated MOSFET micro hot-plate based on an analogue SOI CMOS process

A High Temperature Soi Cmos No2 Sensor

Multi-field Simulations and Characterization of CMOS-MEMS High-Temperature Smart Gas Sensors Based on SOI Technology

SOI-based Micro-hotplate Microcalorimeter Gas Sensor With Integrated BiCMOS Transducer

SOI gas sensors with low temperature CVD films

Design and Fabrication of a CMOS-compatible MHP Gas Sensor

From Ceramic Tube to Microcantilever: A New Strategy for Low Power, Fast Heating and High Integrated Metal Oxide Semiconductor Gas Sensor

Design and Fabrication of MOS Type Gas Sensor with Vertically Integrated Heater Using CMOS-MEMS Technology

Single (111)-Wafer Single-Side Microfabrication of Suspended p + Si/n + Si Thermopile for Tiny-Size and High-Sensitivity Thermal Gas Flow Sensors

Monolithic Integrated Cmos-Mems Mos Type Gas Sensor And Novel Heater For Sensitivity And Power Consumption Enhancement

Non-Silicon MEMS Calorimetric Gas Flow Sensor

Design and Coupled-Effect Simulations of Cmos Micro Gas-Sensors Built on Soi Thin Membranes

Thermal Modeling of Low Power Micromachined Solid State Integrated Gas Sensor

ZnO nanowires grown on SOI CMOS substrate for ethanol sensing

A highly stable, nanotube-enhanced, CMOS-MEMS thermal emitter for mid-IR gas sensing

Thermal Analysis and Design of A Micro-Hotplate for Sisubstrated Micro-Structural Gas Sensor

Design, Simulation, and Fabrication of Multilayer Al2O3 Ceramic Micro-Hotplates for High Temperature Gas Sensors

Study of high-temperature gas sensor based on ceramic micro-hot-plate