Zeolite-Coated Microcantilever Gas Sensor

jia zhou,po li,song zhang,feng zhou,yiping huang,pengyuan yang,minhang bao
DOI: https://doi.org/10.1109/ICSICT.2001.982010
2001-01-01
Abstract:A novel freon gas sensor of piezoelectric microcantilever coated with zeolite has been developed in this paper. Excited by a PZT layers the microcantilevers are employed to detect the concentration of gas Freon-12 by the action of the specific molecular sifter. Tests of concentrations from 10ppm to 500ppm are carried out in a practical experimental cell. The results show that the relationship between the frequency shift and the concentration is linear for concentrations lower than 100ppm. The minimum man changing of 3.5x10(-9)g and the sensitivity of -0.0026%/ppm also can be determined from the experimental results.
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