Successful transferring of active transistors, rf-passive components and high density interconnect from bulk si to organic substrates

l h guo,q x zhang,h y li,e b liao,l k bera,w y loh,c c kuo,g q lo,n balasubramanian,d l kwong
DOI: https://doi.org/10.1109/IEDM.2005.1609441
2005-01-01
Abstract:A thermal bonding based wafer-transfer-technology (WTT) has been developed and successfully applied to transfer active devices, RF-passive components and high density interconnect pre-fabricated by CMOS technology onto a flexible organic substrate. The intrinsic performances of transistors and interconnect are preserved with excellent reliability, and the RF-passive components are clearly demonstrated in much enhanced RF characteristics
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