Abstract:Low-temperature epitaxy of ZnO films was carried out on both Si(001) and silica substrates by reactive e-beam evaporation. Growth temperature was varied between 100°C and 450°C. The optimal growth temperatures were between 200°C and 300°C for Si(001) substrates and 300°C and 350°C for silica, respectively. Structural and optical characteristics grown on both of Si and silica were compared by measurements of X-ray diffraction, Raman scattering and photoluminescence excitation (PLE) spectroscopy. X-ray diffraction showed the ZnO films grown both on Si(001) and silica substrates were all highly c-axis-oriented and their linewidth of (002) diffraction peak is significantly smaller than that measured from ZnO films deposited by magnetron sputtering. However, Raman scattering demonstrated the presence of excess zinc in the ZnO/silica structure. PLE measurements exhibited the sharp band-absorption edge and exciton absorption in the ZnO films on Si(001) and poor optical properties of ZnO on silica. PLE also revealed that the absorption characteristic near the band edge remarkably changed with the variation of oxygen content in the ZnO lattice while X-ray diffraction showed that the crystalline structures of ZnO films grown under different O2 pressure almost remained unchanged. The underlying mechanism of low-temperature epitaxy of high-quality ZnO films and its applications in electronic and optoelectronic devices are discussed.

MOCVD growth and properties of ZnO and Zn1-xMgxO films

LP-MOCVD Growth and Properties of Zn1－xMgxO Thin Film

Preparation and Characterization of Mg-doped ZnO Thin Films by Sol–gel Method

Growth of Cubic MgxZn1-xO Films and Characterization

The deposition and annealing study of MOCVD ZnMgO

Mocvd Growth and Properties of Zno Films Using Dimethylzinc and Oxygen

Structural and Optical Studies of Mg(X)Zn(1-X)Ofilms Grown on Sapphire

STRUCTURAL AND OPTICAL STUDIES OF ZnO FILMS GROWN AT LOW TEMPERATURE

Structural and Optical Characterizations of ZnO Films Grown by Reactive Electron Beam Evaporation

Cubic Mgxzn1-Xo Films Grown on Si(111)

Structural, Morphology and Optical Properties of Epitaxial Zno Films Grown on Al2o3 by Mocvd

Structural and Photoluminesenct Properties of Zn1-xMgxO Thin Film on Silicon

Structural, Electrical And Optical Properties Of Zn1-Xmgxo Films Prepared By Reactive Dc Sputtering

Epitaxial growth and stress analysis of Zn1-xMgxO films on (111) Si substrates

Low-temperature epitaxy of ZnO films on Si(0 0 1) and silica by reactive e-beam evaporation

Structural and electrical properties of (110) ZnO epitaxial thin films on (001) SrTiO3 substrates

Microstructure and Electrical Properties of Al-doped ZnO Thin Films

Epitaxial Zn1−Mg O Films Grown on (1 1 1) Si by Pulsed Laser Deposition

Growth Temperature Dependent Evolutions of Microstructural, Optical and Magnetic Properties of Zn0.75Co0.25O Films

Characteristics of Zno Film Grown by Mocvd

Oxidants in ZnO Thin Film Growth by LP-MOCVD