A compact and alignment-tolerant Si polarization rotator for rib and channel waveguides

haifeng zhou,huijuan zhang,lianxi jia,chao li,xianshu luo,guoqiang lo
DOI: https://doi.org/10.1364/OFC.2014.Th2A.7
2014-01-01
Abstract:A compact (around 10μm long) and alignment-tolerant (no performance degradation under a misalignment of a waveguide width, typically > 300nm) polarization rotator with a single-sided slab is proposed by using two-step self-aligned photolithography.
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