Self-patterning, pre-applied underfilling technology for stack-die packaging

chiachi tuan,ziyin lin,yan liu,kyoungsik moon,chingping wong
DOI: https://doi.org/10.1109/ECTC.2014.6897613
2014-01-01
Abstract:Die stacking is one of the next-generation 3D IC packaging methods, but its stringent material requirements are unlikely to be met by traditional underfills. Moreover, filler trapping is becoming an increasingly serious issue in no-flow and wafer-level underfills. In this report, we demonstrate a novel underfilling technology for the reduction of filler trapping in fine-pitch interconnects. In our method, we fabricate superhydrophobic bond pads, and control the flow of the underfill material by the surface energy difference between the bond pads and the Si3N4 substrate. The superhydrophobic bond pads are shown to have no effect on the bonding of soldering materials to the pads.
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