High-Performance TO Switches on Compact Cu-Dielectric-Si Hybrid Plasmonic WRRs

Shiyang Zhu,Bu Lin,Guo-Qiang Lo,Dim-Lee Kwong
DOI: https://doi.org/10.1109/lpt.2014.2359455
IF: 2.6
2014-01-01
IEEE Photonics Technology Letters
Abstract:We present plasmonic thermo-optic (TO) switches made of compact Cu-dielectric-Si hybrid plasmonic waveguide ring resonators (WRRs), which offer high tuning efficiency and fast switching speed by placing a metal heater closely above the Cu cap and choosing a material with high TO coefficient as the sandwiched dielectric. Prototype devices with 2.5-μm radius and Si3N4 as the dielectric are fabricated on the silicon-on-insulator platform using standard complementary metal-oxide-semiconductor technology and are measured at 1.55-μm telecom wavelengths. They exhibit a Q-value of ~166, a tuning efficiency of ~1.1 nm/mW, a response time of ~6.5 μs, and an output modulation of ~5 dB under a 5 V/10-kHZ driving voltage. Methods for further performance improvement are addressed.
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