A Microgripper with A Ratchet Self-Locking Mechanism

Y. C. Hao,W. Z. Yuan,H. M. Zhang,H. L. Chang
DOI: https://doi.org/10.1109/memsys.2015.7051157
2015-01-01
Abstract:This paper reports a new design for an electrostatic actuated microgripper with a ratchet self-locking mechanism. The self-locking mechanism enables long-time gripping without continuously applying the external driving signal, such as an electrical, thermal or magnetic field, which significantly reduces the effect and damage on the gripped micro-scale objects that are induced by the external driving signals. The microgripper is fabricated using a silicon-on-insulator (SOI) wafer with a 30μm device layer. The jaw gap is 100 μm, and the ratchet locking interval is 10 μm. A metal wire is successfully gripped to demonstrate the feasibility of the ratchet self-locking mechanism.
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