Abstract:Optical metrology is widely used to characterize surface deformations due to the noncontact, full-field, and highly accurate nature of the measurements. In combination with advanced microscopes, optical metrology methods have recently been extended into the microand nanoscales. In measurements that use the moiré (beat pattern produced between gratings of initially equal spacing) method,1–3 gratings act as sensors that record the original deformation of a specimen. Precise preparation of the gratings is therefore required to ensure accurate measurements. Existing technologies for grating fabrication do not meet all the necessary requirements (i.e., production of high-frequency and large-area gratings at low cost) simultaneously. Ordinary photolithography, due to its diffraction limitation, can generally only produce gratings with hundreds of lines per millimeter. Holographic lithography can be used to make gratings with frequencies of up to 4800 lines per millimeter, but there are strict requirements on the optical system and the alignment techniques. Electron beam lithography and focused ion beam lithography can produce fine gratings with up to 10,000 lines per millimeter, but the grating area is very small (micrometer scale).4, 5 We have developed a new moiré grating fabrication method that is based on the nanoimprint lithography (NIL) technique.6 NIL creates nanoscale patterns through mechanical deformation and has low costs, high throughput, and high resolution. This process has already been used in several microelectronic engineering, optical engineering, and bioengineering applications. Our technique can be used to produce gratings with large areas and high frequencies on different specimens, and at fast rates (see Figure 1).7–9 The preparation of the stamp that is used for imprinting is a key issue in our method. When imprinting is conducted at low pressure, a full-contact condition (between the specimen and Figure 1. (a) Grating fabricated on a traditional (millimeter-scale dimensions) specimen (1200 lines per millimeter, cross type).7 (b) Grating fabricated on a thin (<1 m) film specimen (1200 lines per millimeter, cross type).8

High Quality Bragg Gratings Fabricated by Nanoimprint Lithography

Nanoimprinted Polymer Micro/Nanofiber Bragg Gratings for High-Sensitivity Strain Sensing

Fabrication of 200nm period gold free-standing transmission gratings based on nanoimprint lithography

Fabrication of 150 Nm Half-Pitch Grating Templates for Nanoimprint Lithography

Optical Nanostructures Fabricated by Su-8 Based Nanoimprint Lithography

Study of Moiré Grating Fabrication on Metal Samples Using Nanoimprint Lithography

Refined Grating Fabrication Using Displacement Talbot Lithography

Fabrication of Slanted Gratings with High Refractive Index Starting from Master Nanoimprint Mold.

Fabrication of metallic nanostructures by negative nanoimprint lithography

Fabrication of nanoscale gratings with reduced line edge roughness using nanoimprint lithography

Research on manufacturing technology of nanoimprinted grating

Fabrication of High-Density Moiré Gratings

A nanoimprint lithography for fabricating SU-8 gratings for near-infrared to deep-UV application

NANOIMPRINT TECHNOLOGY : RECENT PROGRESS AND APPLICATIONS

Large Area 50nm Period Grating by Multiple Nanoimprint Lithography and Spatial Frequency Doubling

Large Area Direct Nanoimprinting of SiO2–TiO2 Gel Gratings for Optical Applications

Nanoimprint lithography technology

Nanoimprint Fabrication of Planar Photonic and Plasmonic Crystals

Fabrication of Metallic Patterns on Highly Curved Substrates Via Nanoimprint Lithography in Association with an Etch-in Process

6 Nm Half-Pitch Lines and 0.04 Μm2static Random Access Memory Patterns by Nanoimprint Lithography

A New Grating Fabrication Technique on Metal Films Using UV-Nanoimprint Lithography