Intersubband Transitions at Atmospheric Window in Alxga1-Xn/Gan Multiple Quantum Wells Grown on Gan/Sapphire Templates Adopting Aln/Gan Superlattices Interlayer

C. C. Huang,F. J. Xu,X. D. Yan,J. Song,Z. Y. Xu,L. B. Cen,Y. Wang,J. H. Pan,X. Q. Wang,Z. J. Yang,B. Shen,B. S. Zhang,X. S. Chen,W. Lu
DOI: https://doi.org/10.1063/1.3573798
IF: 4
2011-01-01
Applied Physics Letters
Abstract:Defects and strain control in AlxGa1−xN/GaN multiple quantum wells (MQWs) for intersubband transitions (ISBTs) at atmospheric window grown on GaN/sapphire templates by metal-organic chemical vapor deposition have been investigated adopting strain modulation technique using AlN/GaN superlattices (SLs) interlayer. It is found that cracking in the MQWs can be effectively avoided adopting AlN/GaN SLs interlayer. It is demonstrated that AlN/GaN SLs interlayer acts as a flexible layer and relieves most of the tensile strain through buried microcracks in AlN/GaN SLs interlayer. The intersubband absorptions at 3.6–4.1 μm wavelength region have been observed on the crack-free AlxGa1−xN/GaN MQWs. Our results open up prospects to realize crack-free and high quality AlxGa1−xN/GaN MQWs on GaN/sapphire templates for ISBTs devices at 3–5 μm atmospheric window.
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