3D Measurements of Submillimeter-scale Micro-holes with Light-field Image Fusion under Multi-angle Illumination
Shengming Xu,Rui Wang,Fei Zeng,Shengxian Shi
DOI: https://doi.org/10.1088/1361-6501/ad7a1d
IF: 2.398
2024-09-14
Measurement Science and Technology
Abstract:Micro-holes, crucial components in various industries, pose challenges in accurate measurement due to their small dimensions and complex geometries. Traditional methods, such as coordinate measuring machines (CMMs), profilometers, and optical systems, are effective but limited in scalability and efficiency. Light-field imaging offers promising solutions for addressing these challenges by providing spatial-angular information for depth reconstruction. However, uneven illumination and specular reflection on metal substrates hinder accurate depth estimation. To overcome these limitations, we propose a novel approach combining multi-angle illumination and exposure fusion. This method enhances image quality and consistency by capturing raw light-field images under varied illuminations and fusing them to mitigate intensity variations. Experimental verification demonstrates the effectiveness of our method in accurately characterizing micro-holes, with improvements concerning depth estimation accuracy observed up to 40% compared to normal cases. The measuring efficiency can be above 10,000 effective points per second which qualifies in-situ inspections. Moving forward, further optimization and refinement of the proposed method could lead to broader applications in the measurement of other micro-structures under complicated surface conditions using light-field imaging.
engineering, multidisciplinary,instruments & instrumentation