Effects of substrate bias voltage on the critical failure load of Cr-Al-N coatings

Shuwang Duo,Ming Zhu,Jinmin Ge,XiangMing He,Liang Meng
DOI: https://doi.org/10.4028/www.scientific.net/AMR.291-294.180
2011-01-01
Abstract:Cr-Al-N coatings with the thickness of about 2 mu m have been prepared in a magnetron sputtering system by reactive co-sputtering from a chromium target and an aluminum target in a mixed Ar/N-2 atmosphere. The effects of substrate negative bias voltage (VB) on the microstructure and critical failure load have been investigated by a scratch test as the VB varied from 0 to -150 V. The critical failure load reached the maximum value for the coating deposited under VB = -50 V, then decreased with VB further increasing. Re-sputter effect of The heavy bombardment of the ion to the substrate improve the critical failure load for the coating deposited under VB = -50 V. The decrease of the critical failure loads for the coatings deposited under -100V and -150 V probably resulted from the high microstrain in the crystal lattice.
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