Deposition Kinetics and Microstructure of APCVD ZrC Coating

ZHENG Xiang-lin,LI Guo-dong,XIONG Xiang,SUN Wei
2011-01-01
Journal of Central South University
Abstract:ZrC coating was prepared by atmospheric pressure chemical vapor deposition(APCVD) with ZrCl4-CH4-H2-Ar chemical system at different temperatures.X-ray diffractometry(XRD) and scanning electron microscopy(SEM) were used to analyze phase composition,crystalline preferred orientation,and micro-morphology of ZrC coating.The influences of temperature on deposition kinetics and microstructure were also studied.The results show that with temperature increasing,the deposition rate and crystalline size of ZrC coating correspondingly increase.The apparent activated energy is 71.69 kJ/mol,and chemical kinetics is the controlling mechanism at 1 473?1 673 K.However,the apparent activated energy changes to 14.28 kJ/mol and the process is controlled by diffusion at 1 673? 1 873 K.From 1 473 to 1 673 K,ZrC coating is porous and roughness,crystalline preferred orientations change from to,and microstructure of ZrC coating is typical needle-like.When temperature rises up to 1 873 K,crystalline shows short-column,coating is compact as well as smooth,and deposition rate is highest.
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