Abstract:In modern industry, there usually exist high-precision stages, such as reticle stages and wafer stages in VLSI lithography tools, metrology stages in coordinate measurement machines, motion stages in CNC machine tools, etc. These stages need high-precision measurement/metrology systems for monitoring its XY movement. As the metrology systems are quite accurate, we often cannot find a standard tool with better accuracy to implement a traditional calibration process for systematic measurement error (i.e., stage error) determination and measurement accuracy compensation. Subsequently, self-calibration technology is developed to meet this challenge and to solve the calibration problem. In this chapter, we study the self-calibration of two-dimensional precision metrology systems and present a holistic self-calibration strategy. This strategy utilizes three measurement views of an artifact plate with mark positions not precisely known on the un-calibrated two-dimensional metrology stage and constructs relevant symmetry, transitivity, and redundancy of the stage error of the metrology stage. The misalignment errors of all measurement views, especially including those of the translation view, are totally determined by detailed mathematical manipulations. Then, a redundant equation group is synthesized, and a least-square-based robust estimation law is employed to calculate out the stage error even under the existence of random measurement noise. Furthermore, as the determination of the misalignment error components of the measurement views is rather complicated but important in previous and the proposed methods, this chapter also significantly analyzes the necessity of this costly computation. The proposed approach is investigated by simulation computation, and the simulation results prove that the proposed determination scheme can calculate out the stage error rather exactly without random measurement noise. Furthermore, when there exist various random measurement noises, the calibration accuracy of the proposed strategy is also investigated, and the results illustrate that the standard deviations of the calibration error are consistently with the same level of those of the random measurement noises. All these results verify that the proposed scheme can realize the stage error rather accurately even under the existence of random measurement noise. The practical procedure for performing a standard self-calibration is also introduced for engineers to facilitate actual implementation.

Least-square based self-calibration of two-dimensional ultra-precision stages

A Transitive Algorithm For Self-Calibration Of Two-Dimensional Ultra-Precision Stages

Accuracy- and Simplicity-Oriented Self-Calibration Approach for Two-Dimensional Precision Stages

Self-calibration Algorithm of Two-dimensional Ultra-precision Stage

Self-Calibration Of Two-Dimensional Precision Metrology Systems

Quantitative Evaluation of the Uncertainty of Self-Calibration for Ultra-Precision Stages

A Holistic Self-Calibration Approach for Determination of Three-Dimensional Stage Error.

On-axis self-calibration of precision XYθz metrology systems: An approach framework

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A novel on-axis self-calibration approach for precision rotary metrology stages

Three-dimensional Stage Self-Calibration: A General Theory Framework

Calibrate the Non-Orthogonal Error of AFM with Two-Dimensional Self-Traceable Grating.

An on-axis self-calibration approach for precision rotary metrology stages based on an angular artifact plate

LiDAR-Camera Calibration under Arbitrary Configurations: Observability and Methods

Uncertainty Evaluation and Optimization of INS Installation Measurement Using Monte Carlo Method

A Holistic Self-Calibration Algorithm for xy Precision Metrology Systems.

An Optimization of the Fourier Self-Calibration Algorithm for Improved Noise Suppression Capability

Comparison of 3-D Self-Calibration Methods for High-Precision Measurement Instruments

Positioning error calibration for two-dimensional precision stages via globally optimized image registration

Calibration of Three-Dimensional Integrated Sensors for Improved System Accuracy

Robust Equipment-Free Calibration of Low-Cost Inertial Measurement Units