A Holistic Self-Calibration Algorithm for xy Precision Metrology Systems.

Chuxiong Hu,Yu Zhu,Jinchun Hu,Ming Zhang,Dengfeng Xu
DOI: https://doi.org/10.1109/TIM.2012.2187250
IF: 5.6
2012-01-01
IEEE Transactions on Instrumentation and Measurement
Abstract:Self-calibration technology is an important approach with the utilization of an artifact plate with mark positions that are not precisely known to calibrate the precision metrology system. In this paper, we study the self-calibration of xy precision metrology systems and present a holistic self-calibration algorithm based on the least squares method. The proposed strategy utilizes three traditiona...
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