Abstract:This paper presents a novel on-chip passive bandpass fllter for millimeter-wave (MMW) applications that utilizes a pair of electrically-coupled thru-silicon vias (TSV). The presented TSV bandpass fllter can be used in MMW applications such as radar, medical imaging, and communication. The TSV bandpass fllter uses two TSVs to extend two electrically-coupled conductors into the silicon substrate in the z-direction instead of horizontally in the x-y plane. There is a metal layer on the bottom side of the silicon substrate that shorts the ends of the two TSVs to ground. Using TSVs in the bandpass fllter design reduces the silicon area required to implement the fllter compared to the silicon area required for the equivalent conventional fllter in the above-silicon metal-dielectric interconnect stack. The operating performance of the bandpass fllter is controlled at the design stage by choosing the separation distance between the TSVs. In this work, the two TSVs were 145"m in height (z-direction) and 3"m £ 50"m in the x-y plane. The long edges of the TSVs (50"m long edges) faced each other to maximize capacitance coupling between the TSV pair. The TSVs were separated by a distance of 5"m. Full-wave electromagnetic simulations of a TSV fllter designed in an IBM SiGe technology that included TSVs show a minimum pass-band insertion loss of i3:9dB at 77GHz with a usable pass band from 75{85GHz is possible. The simulated operating range of the TSV bandpass fllter design presented in this paper show that it is well suited for automotive radar applications.

Silicon Based THz Antenna and Filter with MEMS Process

A Novel 76 and 94ghz Dual Band Bandpass Filter Using Multilayer Step Impedance Resonators (Sirs)

A Novel Terahertz Waveguide Filter Based on MEMS Technology

Design of Terahertz Waveguide-Fed Antipodal Hyperbolic-Sine Tapered Slot Antenna Based on Silicon Micromachine

A Novel Compact Thru-Silicon-Via On-Chip Passive Mmw Bandpass Filter for 77ghz Applications

A Silicon-Based Self-Shielded MEMS Bandpass Filter

Experimental Realisation of Micromachined Terahertz Electromagnetic Crystal (EMXT) Waveguide Bandpass Filter

A novel microstrip MEMS bandpass filter on silicon substrate

Terahertz Devices with EMXT Structure Fabricated by MEMS

Experimental realisation of micromachined terahertz waveguide-fed antipodal tapered slot antenna

A 340ghz Cross-coupled Waveguide Filter Based on MEMS Process

A MEMS tunable metamaterial filter

A novel integrated MEMS helix antenna for terahertz applications

A Silicon Based Metamaterial Band-Pass Filter for Terahertz Communication System

Design and Fabrication of a MEMS Bandpass Filter with Different Center Frequency of 8.5-12 GHz.

A 60ghz Slot Antenna Based on MEMS Bulk Micromaching Technology

A Novel Terahertz Integrated Horn Antenna on Silicon Substrate

Tunable Terahertz Band-Pass Filter Based on MEMS Reconfigurable Metamaterials

Electrically triggered dual-band tunable terahertz metamaterial band-pass filter based on Si3N4–VO2–Si3N4 sandwich

Si-based Multiband Terahertz Antennas

Diverse SRRs Loaded Millimeter-Wav SIW Antipodal Linearly Tapered Slot Filtenna with Improved Stopband