A Silicon Based Metamaterial Band-Pass Filter for Terahertz Communication System

Wei Xu,Xiuhan Li,Haiyang Guo,Guowu Wei,Dongdong Xu,Dongwei Zhai,Yuping Yang
DOI: https://doi.org/10.1109/nems.2018.8580439
2018-01-01
Abstract:A band-pass filter working in terahertz region has been experimentally proposed. The proposed filter has a 3dB bandwidth of 0.14THz and a Q factor of 3.1. The fabrication method is also proposed in this paper and this process is fit to the existing microelectronic processing technology. A comparative experiment was also carried out to further discuss the characteristic of the proposed filter.
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