Coupled Surface Plasmon Interference Lithography Based On A Metal-Bounded Dielectric Structure

Xiaowei Guo,Qiming Dong
DOI: https://doi.org/10.1063/1.3517793
IF: 2.877
2010-01-01
Journal of Applied Physics
Abstract:We propose a coupled surface plasmon (SP) interference lithography based on a metal-bounded dielectric structure. The long and short range SP interferences at different dielectric thicknesses in the structure are analyzed. The interference in Kretschmann structure under the same conditions is also compared. Numerical results show the coupled SP interference offers better lithography performance as compared with the Kretschmann SP interference. This proposed technique provides potential for fabrication of periodic nanostructures. (C) 2010 American Institute of Physics. [doi:10.1063/1.3517793]
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