High-speed SOI microring modulator integrated with grating couplers

Xi Xiao,Haihua Xu,Yu Zhu,Liang Zhou,Yingtao Hu,Zhongchao Fan,Yuntao Li,Zhiyong Li,Yude Yu,Jinzhong Yu
DOI: https://doi.org/10.1109/GROUP4.2010.5643413
2010-01-01
Abstract:We demonstrate a high-speed SOI microring modulator integrated with grating couplers. Wafer-level measurements were set up for the device characterizations. 60 nm 3-dB coupling bandwidth and 10 Gb/s NRZ modulation are finally realized.
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