Abstract:The IR spectrum from 3 to 5 mum has numerous applications in both military and civil industries. High performance at high operating temperature is often important in these applications. Conventional Focal Plane Arrays(FPAs)without integration with concentrator such as microlens have poor sensitivity and low signal-to-noise ratio because of their lower fill factor. The binary optics microlens arrays reported in this paper are designed for integration with FPAs. Thus, the FPAs' fill factor, sensitivity, and signal-to-noise ratio can be improved while retaining a given image resolution and optical collection area(1). In the paper, we discussed the 256(Horizontal)x290(Vertical) microlens arrays designed for a center wavelength of 4 mum, with 50 mum(Horizontal) x33 mum(Vertical) quadrate pixel dimension and a speed (F number) of F/1.96. PtSi FPAs were fabricated on the front side of a 400-mum-thick Si substrate. The designed diffractive microlens arrays will be etched on the back side of the same wafer in a register fashion and it will be reported in other paper. Considering the diffraction efficiency, 8-phase-level approximation is enough. For the diffraction efficiency of 8-phase-level diffractive microlens reaches 95%. The process only need three mask-level, so we designed and fabricated three masks with the same dimension 4"x4". Also, a set of fine verniers was designed and fabricated on each mask to allow accurate alignment during the fabrication process. Through a computer simulation, the microlens arrays are nearly diffraction limited, with the diffraction efficiency of 93%, a bit lower than the theoretical value of 95%. Introduction of microlens arrays has the ability to increase the FPAs' fill factor to 100%,while it is only about 21.6% without microlens. To our knowledge, this is the first trial of integration large area microlens arrays with FPAs at home.

Diffractive Microlens with A Cascade Focal Plane Fabricated by Single Mask Uv-Photolithography and Common Koh:H(2)O Etching

Design and Fabrication of Diffractive Microlens and Analysis of Optical Characteristics

Design, Manufacture and Properties of High-Definition Diffractive Objective Lens

A Microlens Array with Different Focal Lengths Fabricated by Roll-To-Roll UV Lithography

Versatile Route To Gapless Microlens Arrays Using Laser-Tunable Wet-Etched Curved Surfaces

Fabricating A Variety Of Micro-Optics Structures Using Anisotropic Etching Of Silicon

Multilevel Phase Supercritical Lens Fabricated by Synergistic Optical Lithography

Cost-efficient and Flexible Fabrication of Rectangular-Shaped Microlens Arrays with Controllable Aspect Ratio and Spherical Morphology

Optical Nanofabrication of Concave Microlens Arrays

Fabrication of Concave Spherical Microlenses on Silicon by Femtosecond Laser Irradiation and Mixed Acid Etching.

Fabrication of Polymer Microlens Array with Controllable Focal Length by Modifying Surface Wettability

Design Of Diffractive Microlens Arrays Integration With Focal Plane Arrays

Design and Fabrication of Diffractive Microlens Arrays with Continuous Relief for Parallel Laser Direct Writing.

Refractive Microlensarray Made of Silver-Halide Sensitized Gelatin (shsg) Etched by Enzyme with Slm-Based Lithography

Fabrication of Multifocal Microlens Array by One Step Exposure Process

Fabrication of Microlens Arrays Based on Spatial Light Modulator

Convex Silica Microlens Arrays Via Femtosecond Laser Writing.

Fabrication of Microlens Array with Well-Defined Shape by Spatially Constrained Thermal Reflow

Supercritical Lens Array in a Centimeter Scale Patterned with Maskless UV Lithography.

Design of continuous-relief harmonic diffractive microlens array for maskless lithography

Micropatterning Microlens Arrays Fabricated by A Femtosecond Laser Wet Etch Process