Effect of Experiment Parameters on the Structure and Magnetic Properties of Nizn-Ferrite Films
L. S. Wang,S. J. Nie,J. B. Wang,L. Xu,B. B. Yuan,X. L. Liu,Q. Luo,Y. Chen,G. H. Yue,D. L. Peng
DOI: https://doi.org/10.1016/j.matchemphys.2015.04.044
IF: 4.778
2015-01-01
Materials Chemistry and Physics
Abstract:NiZn-ferrite thin films were deposited by radio frequency magnetron sputtering. The effects of sputtering pressure, substrate temperature, and annealing temperature on the structure and magnetic properties of the NiZn-ferrite thin films were investigated. The results revealed that the lower sputtering pressure was beneficial for the crystallization and grain growth of the NiZn-ferrite films, and the saturation magnetization and coercivity of the films monotonously decreased with increasing the sputtering pressure. Moreover, it was also suggested that a higher substrate temperature could improve the crystallinity and saturation magnetization of the thin films. Additionally, the saturation magnetization monotonously increased with increasing the annealing temperature, while the coercivity exhibited a minimum at an annealing temperature of about 600 degrees C. The change of saturation magnetization and coercivity as a function of sputtering pressure, substrate temperature and annealing temperature could be attributed to the varied crystallinity, grain size, cation distribution and the intrinsic stress of the films. (C) 2015 Elsevier B.V. All rights reserved.