Study on the Etch-channel Defects in Crystal Quartz

李法荟,李建保,华大辰,王晓刚
DOI: https://doi.org/10.16553/j.cnki.issn1000-985x.2009.01.014
2009-01-01
Abstract:Etch-channel is related to dislocation in crystal structure of synthetic quartz.Etch-channel affects fabrication procedure of quartz.At the same time,because quartz devices usually undertake physical impact,vibration,thermal impact,and radiation,etch-channel impairs their performance.In this paper,the mechanism of etch-channel is analyzed.Some technical measurements to restrict the formation of etch-channel are put forwarded.
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