Abstract:Ba0.6Sr0.4TiO3 (BST) films were deposited on Pt/SiO2/Si substrates by radio frequency magnetron sputtering. The deposited films were crystallized by conventional thermal annealing (CTA) and rapid thermal annealing (RTA). The interfacial structures of BST/Pt were studied. High-resolution transmission electron microscopy (HRTEM) observation shows that there is a transition layer at BST/Pt interface, and the layer is 4–5nm thick for CTA and 2–3nm for RTA. X-ray photoelectron spectroscopy (XPS) investigations show that the layer is composed of perovskited BST phase and non-perovskited BST phase. The content of the non-perovskited BST phase is most for CTA, whereas that of the perovskited BST phase is most for RTA. It is found that the transition layer thickens with the increase of annealing temperature, and CTA corresponds to faster thickening rate. XPS shows that the non-perovskited BST phase does not come from the absorbed CO2 or CO contaminations, but from other interfacial elements. Also, it is indicated that the RTA-annealed BST film capacitor shows much better dielectric properties, with an average value of 150 higher dielectric constant and almost two orders of magnitude lower leakage current density than the CTA-annealed film capacitor. Grazing X-ray diffraction (GXRD) patterns exhibit that the RTA-annealed BST films present more compact structure. It is such a compact structure that can effectively prevent the absorbed elements further diffusing toward two sides, and cause thinner transition layer, thus result in higher dielectric constant and lower leakage current density.

Chemical States Change at (ba,sr)tio3/pt Interfaces Investigated by X-Ray Photoelectron Spectroscopy

Studies Of Two Distinct Types Of (Ba,Sr)Tio3/Pt Interfaces

Manipulation of phase transitions and electrical properties of Ba<sub>1-x</sub>Sr<sub>x</sub>TiO<sub>3</sub> thin films through orientation engineering

First-Principles Study of Atomic Structure and Subsurface Dipoles of PbTiO3 (001) Surfaces

Electronic Structures of the SrTiO3(110) Surface in Different Reconstructions.

Evolution of the Surface Structures on SrTiO$_3$(110) Tuned by Ti or Sr Concentration

The influence of post-annealing on the chemical structures and dielectric properties of the surface layer of Ba<sub>0.6</sub>Sr<sub>0.4</sub>TiO<sub>3</sub> films

Evidence of Ba-rich surface segregation in Ba1-xSrxTiO3 and Ba-rich surfactant in SrTiO3/ Ba1-xSrxTiO3 stacks grown by combinatorial pulsed laser deposition

Structural and Electronic Properties of Pbtio3/Srtio3 Superlattices from First Principles

Revealing the Polaron State at the MoS 2 /TiO 2 Interface

Reversible transition between thermodynamically stable phases with low density of oxygen vacancies on the SrTiO3(110) surface.

Atomic-Scale Structure and Properties of Epitaxial PbZr 0.2 Ti 0.8 O 3 /SrRuO 3 Heterointerfaces

Single Crystal Perovskites Analyzed Using X-ray Photoelectron Spectroscopy: 1. SrTiO3(001)

The Interfacial Structures of (ba, Sr)Tio3 Films Deposited by Radio Frequency Magnetron Sputtering

The Interface Between Pt and Bi2Se3: Instability and Formation of a New Ordered Phase

XPS chemical state mapping in opto- and microelectronics

Atomic Structure of the Interface Between Srtio3 Thin Films and Si(001) Substrates

In situ study of the electronic structure of polar-to-polar SrTiO3/(000 1 ̅ )ZnO heterointerface

Atomic‐Scale Structure and Properties of Epitaxial PbZr0.2Ti0.8O3/SrRuO3 Heterointerfaces

Powder X-ray study on perovskites in the system of Ca1-xSrxTiO3 (O ≤ x ≤ 1)

Structural and Electronic Properties of Pt Monolayer Adsorption on PbTiO3(100) Surface