Fabrication of high-quality ZnO/Si heteroepitaxial films by pulsed laser deposition

Jie ZHAO,Li-zhong HU,Wei-wei WANG
DOI: https://doi.org/10.3321/j.issn:1001-9731.2009.06.024
2009-01-01
Abstract:ZnO films have been synthesized on Si (111) substrates by pulsed laser deposition (PLD) under various conditions. For the specimens deposited at different oxygen pressures between 0 and 50 Pa, room-temperature (RT) photoluminescence (PL) measurement indicates the optical properties are dramatically enhanced by introducing oxygen into the growth chamber. The specimen deposited at 50 Pa possesses the most intensive near-band-edge (NBE) emission. However, XRD results show the structural properties of ZnO thin films prepared in oxygen ambient is poor without a single (002) orientation. High-quality ZnO epitaxial film was fabricated by utilizing a low-temperature (500°C) deposited homo-buffer layer. Compared with the film without the buffer, the film with the buffer exhibits aligned spotty RHEED pattern, stronger ultraviolet (UV) emission, and smaller full width at half maximum (FWHM) of 98 meV. RHEED patterns of buffer layers deposited at different temperatures suggest that the present properties of the ZnO epitaxial film may be improved further if the buffer is grown in a temperature range of 600-650°C.
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