Abstract:The paper presents an overview of the new micro-scale experimental mechanics concepts,methods and devices of optical and scanning microscopic stages developed at photomechanical laboratory of Tsinghua University.The research includes micro speckle interferometry,micro marker method,optical probe method,grain deformation and movement analysis.In particular,it also describes several devices and measurement systems developed in our group,which are double-field-of-view speckle interferometer for thin film tensile test,microscopic speckle interferometry which enables an alternative usage of conventional specular interferometry(CSI),ESPI,TSIP and phase shifting for micro-object shape,in-plane and out-of-plane displacement measurements,micro marker measuring stage for local zone deformation measurement,uniaxial tensile setups using in AFM and SEM measuring stages for micro-objects and thin films testing and other instruments for micro-objects testing,such as positioning and loading system,micro force sensor and programmable driving systems of translation platform and displacement sensor.To prove the applicability of these methods and devices,some applications of measurement examples are given and the problems and further research on micro-scale experimental mechanics are discussed.

Development of the Measuring Instrument for Stiffness of Micro Torsion Bar

Developing of a Stiffness Testing System of Micro-torsion Spring

Development of Torsion Experiment Device for Thin- Wall Tube with Open Section

Design and Development of Measurement System for Static Rigidity of Machine Tool with Computer Aided

Design and application of a micro-force measuring system based on the principle of torsion balance

Designing of Mechanical Structure and Translocating Clamp in Flexible Joint Stiffness Measuring System

An New Instrument for Measuring Mechanical Compliance of Micro-Systems

Optimal design for high precision stiffness surveying instrument

An Off-chip Actuated Tensile Test Device for Microscale Mechanical Testing

Development of the super precision rigidity measuring system based on CCD and PC

ANALYSIS OF TORSION RIGIDITY OF MICRO BARS WITH CIRCULAR CROSS SECTION

Design of Rotating Speed and Torsional Moment Measuring System Based on LabVIEW

Measurement of Linear Springs' Stiffness Factor Using Ultrasonic Sensing

Development of a Microtribology Measuring System Based on Virtual Instrument Technology

Design of smart torque sensor based on LabVIEW

Development of an Instrument for Testing the Mechanical Properties of Micro Components

Measurement of Micro-scale Experimental Mechanics Based on Stage of Optical and Scanning Microscopes

Research on Stiffness Precise Measurement of Spring Tubes

Research on Transformation of Stiffness Measurement Mode of Spring-Tube of Electro-Hydraulic Servo Valve

Optimized structure design of portable stiffness testing instrument

Development of Integrated Testing System of Mechanical Properties