Increasing the Sensitivity of Love Wave Sensors with Thicker Waveguide Layer by Modified Spin Coating Method

Jia Hu,Xiosong Du,Guangzhong Xie,Ping Sun,Yadong Jiang
DOI: https://doi.org/10.1117/12.832094
2009-01-01
Abstract:A modified spin coating method is utilized to prepare waveguide layers of Love Wave devices. The thickness of PMMA waveguide layer up to 3.0 μm is obtained with a smooth surface. The properties of these sensors, such as, mass sensitivity, insertion loss are studied as a function of layer thickness. Mass sensitivity up to 705cm2g-1 is demonstrated.
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