Ultrasonic Thin-Walled Tube Wave Structure for Sensing Devices

X Li,ZQ Wang,CK Jen,M Viens,JDN Cheeke
DOI: https://doi.org/10.1109/58.485961
1996-01-01
Abstract:Theoretical and experimental investigations of thin-walled tube acoustic wave devices for gravimetric sensing applications are presented, Integrated sensor configurations have been demonstrated by employing a sol-gel processed thin piezoelectric lead zirconate titanate (PZT) film, This was coated coaxially on stainless steel tubes and interdigital transducers (IDT) fabricated as the transmitter and receiver on the curved tube surfaces. We have observed tube waves along both the axial and circumferential directions between 1 and 6.6 MHz. We have also analyzed the mass sensitivities of different modes propagating along the tubes and shown that high mass sensitivity can be achieved by keeping the tube wall thin.
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