Micromachining of an In-Fiber Extrinsic Fabry-Perot Interferometric Sensor by Using a Femtosecond Laser
WANG Wei,RAO Yun-jiang,TANG Qing-tao,DENG Ming,ZHU Tao,CHENG Guang-hua
DOI: https://doi.org/10.1088/1742-6596/76/1/012014
2007-01-01
Journal of Physics Conference Series
Abstract:In this paper, the fabrication of an in-fiber micro extrinsic F-P interferometric (MEFPI) sensor is reported, for the first time to the best of our knowledge. A micro-rectangular notch within a conventional single-mode fiber (Corning SMF-28) is ablated by using a near-infrared femtosecond laser and the two surfaces of such a micro notch across the fiber forms a MEFPI cavity. Such a MEFPI sensor has a number of outstanding advantages, such as high integration degree, good reliability, very low temperature sensitivity, easy fabrication, capability of mass-production, low cost, etc, offering great potential for sensing applications.