Integral Slide-Mode Variable Structure Control for Temperature System of Multi-Zone Furnace for Space Crystal Growth

于强,石春,吕旭涛,秦琳琳,岳大志
2009-01-01
Abstract:The temperature system of multi-zone furnace for space crystal growth is a strong-coupled MIMO (Multi-Input-Multi-Output) plant. Because crystal growth needed high precision temperature control of the furnace, an integral slide-mode variable structure controller (I-SM-VSC) was given to reject the coupling effect. The controller is totally robust to disturbance satisfying the match condition. And the integral action of the I-SM-VSC can reduce the steady error of the system. The simulation results show that the algorithm has good performance.
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