Temperature Control of MOCVD Based on Variable Universe Fuzzy-PID Algorithm

周峰,许力
DOI: https://doi.org/10.3969/j.issn.1001-182X.2013.10.024
2013-01-01
Abstract:This paper introduces the fuzzy control method based on variable universe idea,which is used in the temperature control of MOCVD system.This controller includes two fuzzy controllers,and one is used to control the universe of inputs and outputs,the other is used to control the temperature of the whole system.By using this method,the performance of the simulation system has improved.
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