Fuzzy-reasoning-based Rescheduling Strategy for Semiconductor Manufacturing

乔非,李莉,马玉敏,王遵彤,施斌
DOI: https://doi.org/10.13196/j.cims.2009.01.104.qiaof.006
2009-01-01
Computer Integrated Manufacturing Systems
Abstract:Rescheduling strategy of semiconductor manufacturing emphasized on two aspects:rescheduling judgment and rescheduling method selection.Since large amount of stochastic and uncertain factors were involved in these two problems,a fuzzy reasoning methodology based on fuzzy Petri nets was proposed.After a Fuzzy Petri Net model oriented to Rescheduling Strategy(FPN-RS) structured by seven elements was defined,the reasoning methodology based on FPN-RS were discussed.Finally,the application and feasibility of the proposed FPN-RS model and model-based reasoning methodology were illustrated by a case study of practical semiconductor manufacturing.
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