Synthesis and characterization of sol-gel derived TiO 2 thin films: Effect of different pretreatment process

H. M. Yang,X. C. Zhang,Q. F. Tao

DOI: https://doi.org/10.1134/S0020168509100112

2009-01-01

Inorganic Materials

Abstract:Titanium dioxide (TiO 2 ) thin films have been successfully synthesized deposited on glass substrates by the sol-gel dip-coating method through different pretreating processes, including heated at 100, 500°C, via freeze drying, microwave heating for 10 min and subsequently annealed at 500°C for 2 h. The as-synthesized TiO 2 films were characterized using X-ray diffraction (XRD), atomic force microscopy (AFM) and ultravioletvisible (UV-vis) absorption spectra analysis technology. The preparation of the precursor sols and TiO 2 films were described in detail. Effects of 100, 500°C, freeze drying and microwave heating pretreatment on crystalline structure, surface morphology, roughness, particle size, optical property and electronic transition of TiO 2 thin films have been primarily investigated. The XRD results demonstrate that the TiO 2 films were well-crystallized and consisted of anatase TiO 2 phase only with (101) plane. The average crystalline size is only about 15 nm at 100°C pretreatment and the absorption edge shifts to shorter wavelength comparing with that at 500°C, freeze drying and microwave heating pretreatment. Pretreatment process is important during the preparation of thin films and has obviously effect on the structure and optical property of TiO 2 films due to the different heating mechanisms.