Effects of Lsmo Buffer Layer on Crystalline Orientation and Ferroelectric Properties of Bi2.9pr0.9ti3o12 Thin Films Prepared by Radio-Frequency Magnetron Sputtering

Wu Yun-Yi,Zhang Duan-Ming,Yu Jun,Zheng Chao-Dan,Wang Yun-Bo
DOI: https://doi.org/10.1088/0256-307x/25/11/080
2008-01-01
Chinese Physics Letters
Abstract:Ferroelectric Bi2.9Pr0.9Ti3O12/La0.67Sr0.33MnO3 (BPT/LSMO) films are fabricated on Pt(111)/TiO2/SiO2/Si substrates by rf-magnetron sputtering method. The influences of the LSMO deposition conditions and LSMO layer thickness on properties of BPT thin films are studied. The LSMO layer deposited at 300 degrees C and 450 degrees C favours preferred (117) orientation of BPT films, while deposited at 600 degrees C for LSMO layer leads to strong (111)preferred orientation of BPT film. With the LSMO buffer layer, the films exhibit improved ferroelectric properties and Pt/BPT/LSMO(20nm)/Pt capacitor shows the largest remnant polarization P-r of 18.4 mu C/cm(2) at 14 V. A similar change in dielectric constant with the increase of LSMO layer thickness is also observed and the highest dielectric constant of 342.7 is obtained for the Pt/BPT/LSMO(20 nm)/Pt film. Compared with the Pt/BPT/Pt film, the Pt/BPT/LSMO/Pt films exhibit better fatigue endurance after 5 x 10 9 switching cycles. Moreover, the LSMO layer has apparent effect on leakage current density and the Pt/BPT/LSMO(20 nm)/Pt film exhibits the lowest leakage current density.
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