XPS analyses on WOx electrochromic films

Haixia Li,Wu Tang,Xiaolong Weng,Longjiang Deng,Zhanxing Kong
2008-01-01
Rare Metal Materials and Engineering
Abstract:WOx/ITO films are deposited on a soft polyethylene terephthalates (PET) substrate by RF magnetron sputtering. The ion valence states of W and the binding energy of O in the colored and the bleached WO, films are analyzed by XPS. It is found by XPS that the W6+, W5+ ions co-exist in the colored WOx films, but only W6+ ions are detected in the bleached WOx films. The change of chemical state of W and the binding energy of 0 have close relationships with the two electrochromic mechanisms of WOx films.
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