Preparation and characteristic properties of WOx thin films on polyethylene terephthalates soft substrate

Hai-xia LI,Wu TANG,Xiao-long WENG,Long-jiang DENG
DOI: https://doi.org/10.3321/j.issn:1001-9731.2007.12.012
2007-01-01
Abstract:WOx/ITO films were deposited on polyethylene terephthalates (PET) soft substrate by RF magnetron sputtering. The microstructure, surface morphology and surface chemical state of WOx films were analyzed by X-ray diffraction (XRD), SEM and XPS, respectively. It can be found that the WOx films are amorphous both in colored and bleached state as well as in original state. It was also found that the reversible color change during electrochromic action in the solution of LiClO4-acetonitrile. There are many pores in original state, the different surface morphology are discussed in terms of the injection and extraction of Li+ in reaction proceeding. The XPS analysis revealed that W element exhibit W6+ in original state and both W6+ and W5+ in the colored state.
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