Magnetron Sputtered WOx Film: Process Vs Electrochromic Properties and Structure

黄佳木,施萍萍,张新元
DOI: https://doi.org/10.3969/j.issn.1001-2028.2003.10.013
2003-01-01
Abstract:Using pure tungsten as target, WOx film was deposited on ITO glass substrate by DC reactive magnetron sputtering. The effect of oxygen content, sputtering power and sputtering-environment temperature on the electrochromic properties and structure were studied. The experimental results show that thus obtained WOx film is amorphous, and that in a certain range, the electrochromic properties can be improved when oxygen content is set lower, and sputtering power and the sputtering-environment temperature higher.
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