Use of Numerical Modeling for Improved of VGF-growth GaAs Crystals

詹琳,苏小平,张峰翊,李金权
2008-01-01
Abstract:It was found that the solid-liquid interface was concave to the crystal during the VGF growth GaAs crystals and it is easy to grow polycrystal at the taper face of crucible.Therefore,experimental thermal field was simulated by using the professional crystal simulation CrysVUn software and an improved project was proposed.The bottom structure is similar to heat exchange system,namely,canceling the bottom heater and affiliating He.Solid-liquid interface which was convex to the crystal was obtained through such change of the structure of thermal field.
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