Fabrication of PtAu Nanoparticles Monolayer Applicable to Nonvolatile Floating Gate Memory

lv jin,chen yubin,pan lijia,pu lin,shi yi,zheng youliao
DOI: https://doi.org/10.3969/j.issn.1672-6030.2008.02.001
2008-01-01
Abstract:The chemical methods of Langmuir-Blodgett(LB) film and reverse microemulsion were successfully applied in the fabrication process of nonvolatile floating gate memory.Well dispersed PtAu nano-particles with 5 nm in diameter were synthesized with the method of reverse microemulsion,and PtAu nanoparticles monolayer was fabricated on the tunneling oxide of floating gate memory with the LB film method.The surface morphology of the LB film was characterized by SEM to clarify the effect of the surface pressure on the film.It indicates that the 2D ordered monolayer can be attained with the surface pressure of 15 mN/m,and the density of nano-particles is 1011 cm-2.The ordered monolayer of PtAu nanoparticles is well applicable to the nonvolatile floating gate memory and the application range of LB film method is well developed.
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