The Development on the Nonlinear Control Method of Piezoelectric Actuator

ZHOU Miao-lei,YANG Zhi-gang,TIAN Yan-tao,GAO Wei,CHENG Guang-ming,QU Xing-tian
DOI: https://doi.org/10.3969/j.issn.1004-2474.2007.06.010
2007-01-01
Abstract:Piezoelectric actuator is widely used in micro-driver and micro-positioning domain.However,piezoelectric actuator has hysteresis nonlinearity.The control accuracy and dynamic response characteristic of piezoelectric actuator are influenced because of its nonlinearity.The application of piezoelectric actuator is limited.The key of the high precise control is reducing and eliminating the hysteresis nonlinearity.Current research work of reducing and eliminating hysteresis nonlinearity is summarized.Finally further research fields are suggested.
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