Effect of Ion Bombarding Energy on the Properties of ZrN/TiAlN Nanometer Multilayered Coatings

CAO Meng,LI Qiang,DENG Xiangyun,LI Dejun
DOI: https://doi.org/10.3321/j.issn:1005-3093.2007.06.013
2007-01-01
Abstract:ZrN/TiAIN multilayered coatings with nanoscale bilayer were synthesized by ion beam assisted deposition(IBAD).XRD,nano indenter,and multi-functional tester for material surface proper- ties were employed to investigate the effect of ion bombarding energy on microstructure and mechanical properties of the coatings.All multilayered coatings almost reveal higher hardness and elastic modulus than the rule-of-mixtures value of monolithic ZrN and TiAIN coatings.At bombarding energy of 200 eV,the momentum transfer between surface atoms and bombarding ions causes an increase in the areal density of multilayered coating due to ion bombarding.ZrN/TiAIN multilayered coating prepared at this bombarding energy possesses the highest hardness(30.6 GPa).Its elastic modulus,surface roughness and friction coefficient are also improved obviously.
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