Study of Magnetic Nanostructures Fabricated Using Laser Interference Lithography

Zijun Zhang,Yuxian Guo,Youmei Chen,Yin Liu,Xiangdong Xu,Shaojun Fu,Jie Wang,Pengshou Xu

DOI: https://doi.org/10.1117/12.782895

2007-01-01

Abstract:Magnetic submicron meter structures were fabricated on Co0.9Fe0.1 films by laser interference lithography combined with ion beam etching. The vertical standing wave was restrained by using proper exposure dose and appropriate development time. Hysteresis loops of the magnetic film and magnetic patterns were presented by surface magneto-optical Kerr effect. The difference magnetism between magnetic patterns with different critical sizes and the film was discussed.