Comprehensive Review of Micro/meso-Scale Machine Tools

Q. Y. Wang,F. Z. Fang,X. T. Hu

DOI: https://doi.org/10.1117/12.782899

2007-01-01

Abstract:The development of micro/meso-scale machine tool was motivated by the fabrication of scaled-down workpieces with better quality, higher efficiency and less expense. In contrast with the batch technologies derived from microelectronics, mechanical tool-based process has many virtues such as the ability of creating free-form features, high material removal and less limitation of the working material. With the occurrence of relative novel precision technologies and components, the option of micro/meso-scale machine tools is superior to conventional macro-scale machine tools in machining micro parts and features. In 1990s, the first microlathe and microfactory were developed by MEL in Japan. This research stimulated the further study on micro/meso-scale machine tools over the world. Meanwhile, mechanical tool-based micromachining was also conducted on these test beds demonstrating the feasibility of the concept on micro/meso-scale machine tools. The development of micro/meso-scale machine tools is supported by many technologies in the fields of controls, feedback systems, servo drives, and general machine design and configuration. However, there is still some difficulties in reaching the same machining level of ultra-precision machine tools. These difficulties and corresponding recommendations for future research, such as the configuration and design of micro/meso-scale machine tools, the micromachining mechanism as well as assembly and handling the workpiece etc., are also described.