Abstract:INTRODUCTION With the ever increasing applications of miniaturized components with high accuracy in a variety of fields, the micromachining process has gained significant importance over the last decade. Researchers have reached the consensus that high aspect ratio and complex geometry 3D structures (made of a variety of materials) are very important. At present, a limited number of technologies retain the capability of manufacturing micro-scale complex 3D shapes with high aspect ratios. In particular, etching-based processes are mainly used to machine silicon and silicon-like materials for MEMS related applications. However, these processes are basically planar 2.5D processes. On the other hand, micro-milling, which is essentially a scaling version of conventional milling processes, represents the most powerful process in terms of versatility and obtainable shapes and features. As the size of the tool and material removal unit are downscaled, there are several critical issues associated with micromachining and machine tools, which are mainly from the increased requirement of positioning accuracy and rotational speed. The whole volume of material removal is small in comparison to the conventional machining process, while higher tool deflections, high tool wear and high risk of tool breakage are often observed, especially for hard work materials. In die/mold industries, more and more hard materials with high strength are recently used to increase the life of molds, which makes the micromachining process even more challenging. Simultaneously, in order to successfully remove the product, micro-injection molds should have a surface finish Rz equal or less than 1.0 μm. To meet the ongoing performance requirements, the extensive investigation and understanding of the micro-milling process is essential in order to control and improve process capability. When the chip thickness is comparable in size to the tool edge radius, the bluntness associated with the tool edge creates a ‘ploughing’ action, which is different from shearing, which is the primary mode of chip formation in micromachining. Ploughing is considered to be a plastic deformation process where there is displacement of asperities between the two interlocking surfaces. Researchers argued that the total force or specific cutting energy had contributions both from the shearing action and the ploughing action. The specific cutting energy increases with a decrease in the undeformed chip thickness; this is commonly referred to as the “size effect”. There are many theories explaining the reasons for the existence of the size effect. Among them are the effect of tool edge radius that causes ploughing, material strengthening effects, subsurface plastic deformation and material separation [1]. The extent of ploughing/rubbing and the nature of the micro-deformation contribute significantly to increased cutting forces [2], burr formation [3] and increased surface roughness [4, 5].

Miniature Machine Tools And Modeling Studies On Process In Micromachining Of Microcomponents

Study on Micromachine Tools in Fabrication of Microparts

State-of-the-art of microcutting technology for the manufacture of microparts

Modeling and Micro-Milling Experiments on Complex 3d Micro-Mould Parts

Dynamics Design Optimization and Experimental Validation of a Miniaturized Machine Tool for Micro-Milling.

Review of dynamic issues in micro-end-milling

Machining technologies and structural models of microfluidic devices

Advances in micro milling: From tool fabrication to process outcomes

Recent Development in Micromanufacturing of Metallic Materials

Micro-milling Machine Tool,micro-Tool Wear and Cutting Forces in Micro-Machining

Research on Multifunctional Micro Machining Equipment

Overview of Non-Traditional Micromachining Technologies

Study to Enhance the Micro-Level in USM

Tooling aspects of micro electrochemical machining (ECM) technology: Design, functionality, and fabrication routes

Development of Micro Milling Machine and Experimental Study on Meso Scale Milling

A Study on the Micro Tooling for Micro/Nano Milling

The State of the Art in Plastic Micro?forming

Modeling of minimum chip thickness in micromachining of hard tool steels with the modified slip line model

Progress in Microforming

Optimization of the process parameters for micro-milling thin-walled micro-parts using advanced algorithms

Progress of Cutting Force Modelling in Micromilling