Design and Fabrication of a Novel Monothically Integrated Dual-Wavelength Tunable Photodetector

Jihe Lv,Hui Huang,Yongqing Huang,Xiaomin Ren,Ang Miao,Yiqun Li,Hongwei Du,Qi Wang
DOI: https://doi.org/10.1117/12.745353
2007-01-01
Abstract:The design and fabrication of a Monothically integrated dual-wavelength tunable photodetector are reported. The dual-wavelength character is realized by introducing a taper substrate. The photodetector operating on long wavelength is Monothically integrated by using heteroepitaxy growth of InP-In0.53Ga0.47As-InP p-i-n structure on GaAs based GaAs/AlAs Fabry-Perot filter structure, which can. be tuned by thermal-optic effect. High quality heteroepitaxy was realized by employing a thin low-temperature buffer layer. The integrated device with a dual-peak distance of 7nm (1530nm,1537nm), a wavelength tuning range of 5.0 nm, and a 3-dB bandwidth of 5.9 GHz was demonstrated, according with the theoretical simulation.
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