Abstract:Parasitic extraction is one of the key techniques in very large scale integration design that has been widely used to build the equivalent-circuit model of interconnects. In this paper, a parallel adaptive finite-element method (AFEM) for capacitance extraction of large-scale interconnects (ParAFEMCap) is developed to provide extremely high parallel scalability and numerical accuracy. First, the proposed ParAFEMCap has the potential of high parallel scalability by taking advantages of several advanced parallel techniques, such as parallel adaptive mesh refinement and dynamic load balancing. To the best of the authors' knowledge, this is the first capacitance extraction field solver that is able to run in parallel on hundreds and even thousands of CPU cores. Second, the proposed ParAFEMCap is based on the AFEM, which is proven to converge to the exact solution of the electromagnetic problems in a theoretically quasi-optimal rate. The solution precision of ParAFEMCap can easily be controlled by varying the threshold for the a posteriori error estimator, while the computational time can easily be reduced by increasing the number of CPU cores. Moreover, ParAFEMCap is shown to have the same linear computation complexity as those integral-equation methods, which make it very promising for capacitance extraction of large-scale interconnect problems. Numerical experiments will demonstrate that ParAFEMCap has the advantages of high computational efficiency and accuracy for solving the capacitance extraction problem of large-scale interconnects with complex multilayer structures.

An Incremental Boundary Element Method for the Variation-Aware Library-Building Procedure of Capacitance Extraction

Fast Library-Building Method for 3D Capacitance Extraction with Variation of Process Parameters

Capacitance Extraction of Three-Dimensional Interconnects Using Element-By-Element Finite Element Method (Ebe-Fem) and Preconditioned Conjugate Gradient (pcg) Technique

Capacitance extraction of high-density 3D interconnects using finite element method

A New Model Library Approach to Extract VLSI Interconnect Capacitance

The Boundary Contour Method for Magneto-Electro-Elastic Media with Linear Boundary Elements

Novel Methodology for Viscous-Layer Meshing by the Boundary Element Method

Enhanced QMM-BEM Solver for 3-D Finite-Domain Capacitance Extraction with Multilayered Dielectrics

A mixed boundary element method for extracting frequency-dependent inductances of 3D interconnects

BBE: Hierarchical Computation of 3-D Interconnect Capacitance with BEM Block Extraction

A Parallel and Incremental Extraction of Variational Capacitance with Stochastic Geometric Moments

Application of Fast Multiresolution in 2 D Parasitic Capacitance Extraction

The Hierarchical H-Adaptive 3-D Boundary Element Computation Of Vlsi Interconnect Capacitance

Organizing and storing of discretized BEM equations in 3D multi-dielectric parasitic capacitance extraction

A New Approach to 3D Parasitic Capacitance Extraction of Interconnects with Building Blocks of Dielectric

Generalized Stochastic Collocation Method For Variation-Aware Capacitance Extraction Of Interconnects Considering Arbitrary Random Probability

A Spectral Stochastic Collocation Method for Capacitance Extraction of Interconnects with Process Variations

A Tailored Fast Multipole Boundary Element Method for Viscous Layer Mesh Generation

Calculating Frequency-Dependent Inductance of VLSI Interconnect by Complete Multiple Reciprocity Boundary Element Method

ParAFEMCap: A Parallel Adaptive Finite-Element Method for 3-D VLSI Interconnect Capacitance Extraction