Abstract:A new thin film pulse transformer for using in ISND and model systems is fabricated by a mask sputtering process. This novel pulse transformer consists of four I-shaped CoZrRe nanometer crystal magnetic-film cores and a Cu thin film coil, deposited on the micro-crystal glass substrate directly. The thickness of thin film core is between 1 and 3 μm, and the area is between 4mm×6 mm and 12mm×6 mm. The coils provide a relatively high induce of 0.8 μm and can be well operated in a frequency range of 0.001~20 MHz. A great interest has been attracted in planar magnetic devices to miniature various electronic equipment including pulse transformers and inductors, especially for the IT electronics applications and ISND modem systems, such as switching converters and inverters in portable equipments (1~3) . In Internet system, the thin film pulse transformer, with the sandwich structure of core/coil/core and coil/core/coil, in general, will be fabricated directly on ceramics substrate by lithography and ion etching dry process. The planar cores with zigzag and spiral coil fabricated on the substrate show high core loss and large magnetic-flux-leakage because their magnetic circuit is not close. Moreover, the lithography and ion etching dry process are very complex and need lots of advanced process systems, such as nitrogen ion beam etching system and sputtering system, thus the price of transformer is very high. In this work, a new pulse micro-transformer fabricated by mask vacuum sputtering process has been described. The pulse thin film transformer is composed of four I-shaped CoZrRe amorphous magnetic layers wound with Cu thin film coil, with primary and secondary coil turn of 3:3 and 3:2. The measured results show that the I-Shaped thin films transformer has a high Q value and good operation properties at high frequency, especially in range of 0.001~20 MHz. experiments is shown in Fig.1. The coils wound around the center of CoZrRe I-shaped magnetic core are connected to the upper and lower Cu patterns. The angle between the primary coil and the parallel direction is 22°, while as to the secondary coil this angle is 27°. In order to increase the mutual inductor, the primary and secondary coils are wound in an intercourse way. The length and width of the core are 6 mm and 3 mm, respectively. The coil width is 0.3 mm, and the width between adjacent coils is 0.5 mm apart.

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