A Study of Electron Distribution Characteristics in Ionization Process of Electron Cyclotron Resonance Discharge

XiaoLin Jin,ZhongHai Yang,Tao Huang
DOI: https://doi.org/10.1109/ivelec.2007.4283353
2007-01-01
Abstract:In this work, the characters of electron distribution functions in ionization process of the argon ECR microwave discharge have been studied with the method of quasi-three-dimensional electromagnetic particle-in-cell plus Monte Carlo collision. The results of the particle simulation for the ECR discharge which include the features of electron energy distributions have been presented.
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