Self-consistent simulation of electron cyclotron resonance plasma discharge

Minghai Liu,Xiwei Hu,Qinchong Wu,Guoyang Yu,Yuan Pan
DOI: https://doi.org/10.1063/1.874159
IF: 2.2
2000-01-01
Physics of Plasmas
Abstract:Microwave fields in an extended electron cyclotron resonance (ECR) plasma reactor were analyzed in the resonant cavity from Maxwell’s equations, and a formalism of microwave absorption was investigated at the resonance zone with plasma kinetic theory and simulated using a two-dimension computer hybrid-code. The results indicated that there are three typical power deposition profiles over the entire parameter range: (1) the parabolic shape: peaking on axis and decreasing slowly along the radius, (2) the trumpet shape: peaking on axis and decreasing quickly along the radius, and (3) the camel shape, i.e., a hollow distribution. The spatial distributions of plasma parameters (plasma density, electron temperature, ionization rate, etc.) would be significantly influenced by the microwave power absorption profile.
What problem does this paper attempt to address?