Research on Electron Energy Distribution Features in Electron Cyclotron Resonance Discharge

Zhong-hai YANG,Xiao-lin JIN
DOI: https://doi.org/10.3969/j.issn.1001-0548.2009.05.011
2009-01-01
Abstract:The code with quasi-three-dimensional electromagnetic particle-in-cell plus Monte Carlo collision (PIC/MCC) method is proposed for the research of ionization process of argon electron cyclotron resonance (ECR) discharge. The electron energy distributions in different regions of ECR reactor are obtained when the steady state of ECR discharge attains, and the variations of these distributions with neutral pressure and external magnetic field are also discussed. As the neutral pressure increases, the low energy electrons decrease and the high energy ones increase at the region away from ECR layer, while the variations of electron energy distribution with neutral pressure are opposite at ECR layer. In the far downstream region, the electron energy confinements are better with the mirror-type magnetic configuration than with the convergence-type one. The simulation results and discussions are useful for the optimization of the ECR plasma applied in deposition, etching or other micro-electronic fabrications.
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