Irradiation Effect of Molybdenum-Rhenium Alloy

Yin HU,Zheng-cao LI,Guo-fu SHENG,Zheng-jun ZHANG
DOI: https://doi.org/10.3969/j.issn.1000-6931.2007.z1.024
2007-01-01
Abstract:Using ion implantation technology, the selective surface modification was carried out on Mo-Re alloy films after the irradiation by Xe ions of 200 keV. The different alloy components of these films were analyzed by X-ray fluorescence spectrum (XRF). On the other hand, white-light interferometric profilometer was applied to measure the etching depth and surface roughness of the irradiated area, in order to investigate the relationship between alloy components and irradiation properties. The results show that the addition of Re could improve the anti-sputtering property of the Mo alloy films.
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